INTRODUCTION TO GAS AGGREGATION SOURCES
History
Principles of Gas Aggregation
Types of Gas Aggregation Sources
RECENT MODIFICATIONS OF GAS AGGREGATION SOURCES
Multi-Element Approach
Hollow Cylindrical Magnetron
High Flux DC Magnetron Sputtering
High Flux Metal Vapor Cell
High-Power Microwave...
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INTRODUCTION TO GAS AGGREGATION SOURCES
History
Principles of Gas Aggregation
Types of Gas Aggregation Sources
RECENT MODIFICATIONS OF GAS AGGREGATION SOURCES
Multi-Element Approach
Hollow Cylindrical Magnetron
High Flux DC Magnetron Sputtering
High Flux Metal Vapor Cell
High-Power Microwave Plasma Source
Room Temperature Aggregation
HIPIMS
Pulsed Gas Aggregation
High Pressure and Reactive Gas Magnetron Sputtering
POST-GROWTH MANIPULATION OF NANOPARTICLES
Coating
Annealing
Deflection and Mass Filtering
Control Landing Energy
In Flight Analysis
PERSPECTIVES
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